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15kv 20kv 30kv Semi-HiPressure Hipressure





DN40CF mounting flange
DN40CF mounting flange
DN40CF mounting flange
add-on for 15/20/30 REG
RHEED Guns
add-on for 15/20/30 REG
RHEED Guns
340 μA max current (up to 1mA on request)
250 μA max current (up to 1mA on request)
170 μA max current (up to 1mA on request)
DN40CF mounting flange
DN40CF mounting flange
242 mm length
242 mm length
318 mm length factor 1000 pressure reduction
factor 200.000 pressure reduction
up to 15 kV energy
up to 20 kV energy
up to 30 kV energy
Beam alignment aperture
Beam alignment aperture
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RHEED System 15 kV - REG15

Technical Data:

Energy Range
7-15 kV
Max. Current
340 μA (up to 1mA on request)
Beam Spot Size
<70 μm
Focus Lens
electrostatic
Deflection
magnetic X-Y
Beam Rocking
Beam Blanking
Mounting Flange
DN40CF
Bakeout Temp.
200°C
Dimensions
length 242 mm

RHEED System 20 kV - REG20

Technical Data:

Energy Range
7-20kV
Max. Current
250 μA (up to 1mA on request)
Beam Spot Size
<70 μm
Focus Lens
electrostatic
Deflection
magnetic X-Y
Beam Rocking
Beam Blanking
Mounting Flange
DN40CF
Bakeout Temp.
200°C
Dimensions
length 242 mm



RHEED System 30 kV - REG30

Technical Data:

Energy Range
10-30kV
Max. Current
170 μA (up to 1mA on request)
Beam Spot Size
<70 μm
Focus Lens
electrostatic
Deflection
magnetic X-Y
Beam Rocking
Beam Blanking
Mounting Flange
DN40CF
Bakeout Temp.
200°C
Dimensions
length 318 mm


Semi-HiPressure add-on for 15/20/30 REG RHEED Guns

Technical Data:

Pressure reduction through single differential pumping
Factor 1000
Stable emission with add-on at chamber pressure
1x10-4 mBar
Beam alignment through aperture in phosphor coated disk
Deflection
magnetic X-Y
Beam Rocking
Mounting Flange
DN40CF
Bakeout Temp.
200°C
Dimensions (total length of add-on including gate valve)
335 mm


HiPressure add-on for 15/20/30 REG RHEED Guns

Technical Data:

Pressure reduction through dual differential pumping
Factor 200.000
Stable emission with add-on at chamber pressure
5x10-2 mBar
Beam alignment through aperture in phosphor coated disk
Deflection
magnetic X-Y
Beam Rocking
Mounting Flange
DN40CF
Bakeout Temp.
200°C



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